www.microesys.com

                               
Benefits:

-     Small, compact sensor with the lowest Z-height in the market

-   Resolutions from to 1.2nm linear; 20Kcpr to 268Mcpr rotary

-         Short travel tape scale accuracy of ±70nm; long travel better than ±5µm

-         Short travel glass scale accuracy of ±25nm; long travel better than ±1µm

-         Speeds to 4m/s at 0.1µm – fastest in the industry!

-         Cut-to-length tape or glass scales – same sensor!

-         Stick-on optical index and dual discreet limit sensors – no epoxies or holes to tap!

-         Index capable and repeatable at max velocity

-         Wide alignment tolerances

-         Contamination resistant

-         SmartPrecision™ software for setup, monitoring and diagnostics

-         Programmable resolution, output frequency and alarms – stock one sensor for many applications!

-         Remote LED indicators including limit outputs, visible in the smallest space integrations

-         Digital output from the sensor for excellent noise immunity

-         Real-time outputs

-         Vacuum rated models to 10-8 Torr; 150°C bake-out